Optimisation of the FIB induced damage in TEM diamond samples

Abstract

Due to diamond extreme properties, it is very hard to prepare a TEM sample from diamond using traditional methods of preparation including mechanical thinning, ion milling or chemical etching. At the same time diamond can be relatively easily micro‐machined using focused ion beam (FIB) technique. Using this technique a cross‐sectional TEM sample of diamond can be prepared in a few hours. Also, combination of ion implantation and FIB milling allows device fabrication in diamond at micro and nano scales levels. In the last decade FIB milling became essential tool for TEM sample preparation as well as for nanofabrication in diamond. However, Ga FIB milling has an unavoidable result in formation..